- Title
- An experimental comparison of PI, inversion, and damping control for high performance nanopositioning
- Creator
- Fleming, Andrew J.; Leang, Kam K.
- Relation
- 2013 American Control Conference (ACC). Proceedings of the 2013 American Control Conference (Washington, DC 17-19 June, 2013) p. 6027-6032
- Publisher Link
- http://dx.doi.org/10.1109/ACC.2013.6580782
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2013
- Description
- This article compares the performance of three feedback control methodologies for high performance nanopositioning applications. Integral resonance damping control is a new approach for controlling mechanical systems. In this approach, the system resonances are actively damped rather than inverted which maximizes the closed-loop bandwidth and provides robustness to changes in the resonance frequencies. This technique is comprehensively compared to the standard methods of PI and inversion control in a practical environment. A five times improvement in the settling-time and bandwidth is demonstrated.
- Subject
- bandwidth; damping; frequency control; gain; load modeling; nanopositioning; resonant frequency
- Identifier
- http://hdl.handle.net/1959.13/1063030
- Identifier
- uon:17190
- Identifier
- ISBN:9781479901777
- Language
- eng
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